Equipment available at CSIRO
|
Brett |
CSIRO |
03 9545 2693 |
| Micropattern generation | Optec Micromaster Laser Writer | |
| Electrical Interconnects | Ball and wire bonder | |
| Polymer coatings | RF plasma polymeriser | |
| Device packaging | Hot Roll Laminator | |
| Device packaging | Microspot Welder | |
| Device packaging | Diamond Scribe and Disco Dicing Saw | |
| Lithography | Class 100 clean room , spinners, UV flood source | |
| Lithography | Electron beam lithography | |
| Visualization | Optical microscopes | |
| Lithography | Karl Suss MJB 30 Mask aligner | |
| Vacuum oven and digital hotplates | ||
| Etching | STS 320 RIE system | |
