Equipment
|
Chris |
Swinburne |
03 92148706 |
| Nanoscale patterning | Dip Pen Lithography | |
| Biochemical Assays |
Gel Electrophoresis, western blotting, ELISA, spectrophotometry | |
| Protein, cell and polymer interactions | Quartz Crystal Microbalance (QCM-D) |
|
| Biological Microscopy | Optical, Fluorescence and Confocal Microscopy | |
| Plasma polymerization facility | ||
|
Brett |
CSIRO |
03 9545 2693 |
| Micropattern generation | Optec Micromaster Laser Writer | |
| Electrical Interconnects | Ball and wire bonder | |
| Polymer coatings | RF plasma polymeriser | |
| Device packaging | Hot Roll Laminator | |
| Device packaging | Microspot Welder | |
| Device packaging | Diamond Scribe and Disco Dicing Saw | |
| Lithography | Class 100 clean room , spinners, UV flood source | |
| Lithography | Electron beam lithography | |
| Visualization | Optical microscopes | |
| Lithography | Karl Suss MJB 30 Mask aligner | |
| Vacuum oven and digital hotplates | ||
| Etching | STS 320 RIE system | |
| Michael Austin |
RMIT | 03 9925 2459 |
| Lithography | Nano-imprint lithography | |
| Lithography | Photolithography | |
| Thin film depostion | PVD thermal evaporation | |
| Thin film deposition | PVD electron beam evaporation | |
| Cleaning/packaging | Plasma etcher | |
| Thin film deposition | Tube furnace access | |
| Laboratory | Class 1000 cleanroom | |
| Thin film deposition | Au electroplating | |
| Characterisation | Profiler | |
| Thin film deposition | RF sputter deposition system | |
| Device packaging | Diamond saw | |
| Device packaging | Optical polishing | |
| Device packaging | Wire bonder | |
| Peter Miller |
Monash | 03 9905 5291 |
| Lithography/Characterisation | FEI Quanta 3D FIB-SEM | |
| Characterisation | JEOL JEM 2100F FEGTEM (2008) | |
| Characterisation | Philips CM20 TEM (1992) | |
| Characterisation | JEOL JEM 2011 TEM (2000) | |
| Characterisation | JEOL JSM 7001F FEGSEM | |
| Characterisation | JEOL JSM-840A SEM (1986) | |
| Characterisation | JEOL JSM 6300F FEGSEM (1991) | |
| Characterisation | Philips EM420 (1983) | |
| Characterisation | Reichert FCS Cryo-microtome | |
| Characterisation | Reichert Ultracut E microtome | |
| Characterisation/Visualization | Olympus Optical microscope with CCD camera |
|
| Sample preparation | Struers Tenupol 2, 3, 5 Twin Jet Electro-Polishers | |
| Sample preparation | Atom Probe Tip Polisher (in-house) | |
| Sample preparation | Cressington 208HR Sputter Coater | |
| Sample preparation | Dynavac Evaporative Coater | |
| Sample preparation | Dynavac SC150 Sputter Coater | |
| Sample preparation |
Gatan 691 Precision Ion Polishing System (PIPS), two systems | |
| Sample preparation |
Gatan 682 Precision Etching and Coating System (PECS) and Perpendicular Slope Cutting Tool | |
| Sample preparation | Gatan 950 Solarus Advanced Plasma System | |
| Sample preparation | Gatan 656 Dimple Grinder | |
| Sample preparation | Gatan 601 Ultrasonic Disc Cutter | |
| Sample preparation | Struers Accutom 50 Precision Saw | |
| Sample preparation | Gentle Mill | |
| Laboratory | Darkroom Facilities | |
| Characterisation | Image Plate Reader (Ditabis Micron) | |
| Laboratory | Computer room and various software packages | |
| James Friend |
Monash | 03 9905 3551 |
| Lithography | SUSSMicrotec Delta 80RC spinner | |
| Lithography | SUSSMicrotec MA6 Aligner | |
| Wet etch suite | ||
| General facilities | Vacuum oven, small spin coater, other general equipment in class 1000 area, and class 1000 area access | |
| Thin film deposition | Hummer DC/RF sputtering system | |
| Etching | Plasma etcher | |
| Device packaging | Wire bonding | |
| Device packaging | Diamond scribing system | |
| Micromanipulator station | ||
| Characterisation | Polytec PI MEMS LDV MSA-400 3D vibrometer | |
| Characterisation | Optical microscopy beyond incidental use | |
| Laboratory | Clean room 10000 area, including air bearing supported 25t floor and optical table | |
| Characterisation | Dantec MicroParticle Image Velocimeter | |
| Characterisation | Agilent 4294A impedance analyzer | |
| Characterisation | GRAPHTEC laser Doppler vibrometer | |
| Visualisation/characterisation | High-speed microvideography (Olympus iSpeed) | |
| Visualisation/characterisation | High-speed microvideography (USB) | |
| Visualisation/characterisation | Olympus fluorescence microscopy (boom unit) | |
| Characterisation | TSI Scanning Mobility Particle Sizer | |
| Electrical measurement | Advantest R3762A Network Analyzer | |
| Electrical measurement | High-voltage, pulse, high-frequency signal generation | |
| Laboratory | Analysis workstations w/ANSYS, COMSOL, Mathematica, LinkCAD | |
| Paul Pigram |
LaTrobe University | 03 9479 2618 |
| Characterisation | Ultra DLD XPS - in situ sample prep | |
| Characterisation | Nova XPS - automated | |
| Characterisation | ToF-SIMS IV | |
| Characterisation | Asylum AFM - inverted µscope | |
| Characterisation | Asylum AFM - stand alone | |
| Andrew Peele |
LaTrobe University | 03 9479 2622 |
| Characterisation | Xradia X-ray microtomography | |
| Characterisation | Confocal µscopy - Fluorescence | |
| Characterisation | Fluorescence Correlation Spectroscopy (FCS) | |
| Nanoscale patterning | E-beam | |
| Etching | RIE | |
| Thin film deposition | Sputtering | |
| Daniel Riley |
Melbourne University | 03 8344 2207 |
| Thin film deposition | Pulsed laser deposition | |
| Characterisation |
Atomic scale imaging (Transmission electron microscopy, STM, in vacuum, air and at different temperatures) | |
| Characterisation | Ultra high field nuclear magnetic resonance spectroscopy | |
| Characterisation |
Advanced spectroscopic techniques, allowing the detection and characterisation of single nanoparticles. | |
| Characterisation | Agilent 8453 UV-VIS Spectrophotometer | |
| Characterisation |
Cary 4000 UV-VIS Spectrophotometer (with diffuse reflectance accessory | |
| Characterisation | Ellipsometry | |
| Characterisation | Quartz crystal microgravimetry | |
| Characterisation | Raman spectroscopy | |
| Characterisation | Varian 7000 Fourier Transform-IR Spectrophotometer | |
| Characterisation | Dynamic light scattering | |
| Characterisation | Malvern HPPS particle sizer (DLS) | |
| Characterisation | Malvern Zetasizer | |
| Sample handling | Automated Sample Handling | |
| Characterisation | JEOL JAFM 4500XT UHV AFM | |
| Characterisation | Staib Surface Spectroscopy facility | |
| Characterisation | JEOL AFM (JSTM 4200A) | |
| Characterisation |
Nanonics NSOM/AFM, coupled to the Renishaw micro-Raman spectrometer. | |
| Characterisation | NT-MDT SMENA portable AFM | |
| Characterisation |
NEC 5U Pelletron, operating as a high brightness source of light ions operating at charging potentials of 0.5 to 5 MeV | |
| Materials fabrication | Ion Implantation | |
| Characterisation | Rutherford Backscattering (RBS) | |
| Characterisation | Proton Induced X-ray emission (PIXE) | |
| Characterisation | Ion Beam Induced Charge measurements (IBIC) | |
| Characterisation | Channelling Contrast Microscopy (CCM) | |
| Characterisation | Scanning Transmission Ion Microscopy (STIM) | |
| Fabrication/Characterisation |
Orsay Physics Focussed Ion Beam (FIB) with crossed electron beam for performing concurrent SEM measurements | |
| Device fabrication |
Colutron low energy ion implanter (0.01-15 keV) predominantly used for phosphorus implantation of Quantum Devices | |
| Laboratory | Class 350 Cleanroom | |
| Laboratory | Class 35 laminar flow cabinet | |
| Thin film deposition | Astex microwave HPMD/ECR system for diamond coating | |
| Laboratory | Wet chemical processing facility | |
| Materials fabrication | Inert gas furnace annealing | |
| Characterisation | Time-resolved reflectivity | |
| Lithography |
Neutronix Quintel Q4000-6 UV Photolithographic Processing | |
| Characterisation | Star Cryo-electronics DC SQUID | |
| Characterisation | SULA Deep Level Transient Spectroscopy system (DLTS) | |
| Characterisation | Dilor XY triple grating, high resolution spectrometer | |
| Characterisation |
Reinshaw RM 1000 single grating, extended wavelength Raman/luminescence system, including a Coherent 190 FRED, Kimmon HeCd and Stellar Pro 514 Modulaser | |
| Characterisation | Micro-Raman Spectrometer | |
| Chris Hurren |
Deakin University | 03 5227 2374 |
| Characterisation | Field Emission Scanning Electron Microscope with EBSD | |
| Characterisation | Transmission Electron Microscope (TEM) | |
| Characterisation | Tungsten filament SEM | |
| Sample cleaning/bonding | Plasma machine (atmospheric) | |
| Thin film deposition | Vacuum furnace | |
| Fabrication | Polymer blending line | |
| Fabrication | Filament extrusion | |
| Characterisation | Polymer characterization (DSC) | |
| Characterisation | DMA | |
| Sample preparation/characterisation | Metallographic facilities |
