Facility Design
The Melbourne Centre for Nanofabrication (MCN) is an entirely new purpose-built facility adjacent to the Monash University campus and the Australian Synchrotron at Clayton, Victoria. The facility houses class 100-10,000 cleanroom and biological laboratory environments.
The emphasis of the MCN is the chemical and biological manipulation of nanostructures; packing of components into functional devices; and rapid prototyping to design and build devices.
Cleanroom capabilities of the new Centre include photo- and electron beam lithography, patterned deposition and patterned etching, as well as novel techniques such as embossing, inkjet and electroforming.
Flagship equipment includes an electron beam lithography (EBL) system for generating patterned structures and features on a nanoscale; a dual-beam focussed ion beam electron microscope (FIB-SEM) for etching nanoscale patterns; a nanoimprinting system; and a reactive-ion etcher (RIE) with deep reactive-ion etching (DRIE) capability.
