Equipment available at Monash MNRL facility
| James Friend |
Monash | 03 9905 3551 James.Friend@eng.monash.edu.au |
| Lithography | SUSSMicrotec Delta 80RC spinner | |
| Lithography | SUSSMicrotec MA6 Aligner | |
| Wet etch suite | ||
| General facilities | Vacuum oven, small spin coater, other general equipment in class 1000 area, and class 1000 area access | |
| Thin film deposition | Hummer DC/RF sputtering system | |
| Etching | Plasma etcher | |
| Device packaging | Wire bonding | |
| Device packaging | Diamond scribing system | |
| Micromanipulator station | ||
| Characterisation | Polytec PI MEMS LDV MSA-400 3D vibrometer | |
| Characterisation | Optical microscopy beyond incidental use | |
| Laboratory | Clean room 10000 area, including air bearing supported 25t floor and optical table | |
| Characterisation | Dantec MicroParticle Image Velocimeter | |
| Characterisation | Agilent 4294A impedance analyzer | |
| Characterisation | GRAPHTEC laser Doppler vibrometer | |
| Visualisation/characterisation | High-speed microvideography (Olympus iSpeed) | |
| Visualisation/characterisation | High-speed microvideography (USB) | |
| Visualisation/characterisation | Olympus fluorescence microscopy (boom unit) | |
| Characterisation | TSI Scanning Mobility Particle Sizer | |
| Electrical measurement | Advantest R3762A Network Analyzer | |
| Electrical measurement | High-voltage, pulse, high-frequency signal generation | |
| Laboratory | Analysis workstations w/ANSYS, COMSOL, Mathematica, LinkCAD | |
