Polymer Electronics Laboratory
Thermal Evaporation
Introduction
The dual glovebox system for polymer electronics fabrication provides an inert atmosphere for spin coating, electrode or counter-electrode deposition and assembly of organic photovoltaic (OPV) and other flexible electronic devices. Integrated into the glovebox system is a high vacuum chamber with mask transfer system for the thermal evaporative deposition of patterned electrodes and an atomic layer deposition (ALD) system for counter electrode deposition.
Applications
OPV and flexible transistor fabrication.
Equipment
The Angstrom Engineering polymer electronics glovebox system maintains a pure inert atmosphere by circulating dry N2 through a purifier and solvent trap. The dual glovebox arrangement separates processes and chemistries while enabling sample and equipment transfer via a large diameter antechamber. A laminar flow unit and spincoater is installed in the organic chemistry glovebox. Another glovebox has integrated thermal evaporation and atomic layer deposition facilities. Currently available in the materials library for thermal evaporation is Al, Ag, Ca, MoO3, C60, BCP. Consult the ALD — Savannah Equipment description for a list of available precursors.
Documentation
For more information please refer to the link below from Angstrom Engineering.
http://www.angstromengineering.com/glove_box_integration.html
Contacts
For more details about the polymer electronics glovebox system at MCN or enquiries about access please contact:
Zoran Vasic – Zoran.Vasic@monash.edu