Equipment available at RMIT University
| Michael Austin |
RMIT | 03 9925 2459 michael.austin@rmit.edu.au |
| Lithography | Nano-imprint lithography | |
| Lithography | Photolithography | |
| Thin film depostion | PVD thermal evaporation | |
| Thin film deposition | PVD electron beam evaporation | |
| Cleaning/packaging | Plasma etcher | |
| Thin film deposition | Tube furnace access | |
| Laboratory | Class 1000 cleanroom | |
| Thin film deposition | Au electroplating | |
| Characterisation | Profiler | |
| Thin film deposition | RF sputter deposition system | |
| Device packaging | Diamond saw | |
| Device packaging | Optical polishing | |
| Device packaging | Wire bonder | |
