Doug Mair, Instrument Manager from the Melbourne Centre for Nanofabrication, worked collaboratively with Dr Raymond Dagastine from the Particulate Fluids Processing Centre at Melbourne University to develop silicon cantilevers to continue the already extensive research performed by his group into the area of bubble and oil drop dynamics. The goal of the project was to design and manufacture silicon cantilevers with different spring constants and gold paddle sizes to assist with characterisation of deformable drops on Confocal and AFM systems.
The project went through several stages, from concept to design through to process development. All process development has been completed and the first wafer of cantilevers has been successfully fabricated and tested. This project brought together many of the capabilities of MCN including front side and backside pattern alignment, chrome/gold evaporation, deep reactive ion etching (Bosch Process), chemical processing through to final characterisation of product on AFM all under the one roof.
The following video series explores the 10 stages of the cantilever project conducted within the class 100/ 10,000 cleanrooms at the MCN facility.
Process Flow Video
Stage 1 - Gowning Up
Stage 2 - Cleaning the Silicon Wafer
Stage 3 - Spinning Photoresist on a silicon wafer
Stage 4 - Using the Mask Aligner to expose regions using UV light
Stage 5 - First development
Stage 6 - Evaporation Process
Stage 7 - Characterisation and feature measurement using the Profilometer
Stage 8 - Lift-off process to remove residual gold particles
Stage 9 - Spinning Photoresist using positive resist
Stage 10 - Bosch etching
Stage 11 - HF Release
Professor James Friend is a member of the Technology Fellowship Program at the MCN.
His project involves examining the phenomena of rapid fluid flow in nanochannels induced by surface acoustic waves. Very high frequency sound waves (10-1000MHz) applied in microscale channels enables pmping, mixing, particle separation and other phenomena useful for medical diagnostics and chemical detection devices.
James' team has expertise in many capabilities at MCN including the focused ion beam, electron beam lithography, UV lithography, deep reactive ion etching, chemical etching, 3-dimensional printing, confocal and high speed fluoroscopy.
The team behind the ABC science show catalyst have filmed two seperate interviews with Professor James Friend and Professor Leslie Yeo of RMIT University (formally MNRL, Monash University). Click on the video below to view the footage.