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CMOS compatible fabrication process of MEMS resonator for timing reference and sensing application
Proc. of SPIE
D.H. Huynh, P.D. Nguyen, T.C. Nguyen, S. Skafidas, R. Evans
Proc. of SPIE
D.H. Huynh, P.D. Nguyen, T.C. Nguyen, S. Skafidas, R. Evans