Instruments and contacts

Design and prototyping

3D printer  
(Objet Eden 360)
Hemayet Uddin 

Nanoarray Spotter
(NanoPrintTMLM60)
Hemayet Uddin 

Lithography

Electron beam lithography
(EPG5000PlusES)
Fatima Eftekhari

Focused ion beam
(FEI Helios Nanolab 600 Dual FIB-SEM) 
Fatima Eftekhari

Hot embosser
(EVG 520IS)
Ricky Tjeung

Nano imprint lithography
(EVG6200)
Ricky Tjeung

PDMS laboratory  
Hemayet Uddin

Direct write lithography
(Intelligent micro patterning SF100 XPRESS)
Sean Langelier

Photolithography
(EVG 6200 mask aligner) 
Ricky Tjeung

Photolithography
(SUSS MA6)
Ricky Tjeung

Photolithography
(ABM UV flood light source)
Ricky Tjeung

Spin coating
(SUSS Delta 80RC)
Ricky Tjeung

Spin coating and wafer development  
(Pico Track PCT-150RRE)
Bernie Orelup

Thin films

Electron beam evaporator
(Intlvac Nanochrome II) 
Yang Lim

Atomic layer deposition
(Cambridge Nanotech Fiji F200) 
Lachlan Hyde

Atomic layer deposition
(Cambridge Nanotech Savannah S100)
Lachlan Hyde

Thermal evaporator
(Angstrom Engineering EvoVac)
Lachlan Hyde

Gold electroplating
(Digital Matrix PMT-16)
Abu Sadek

Nickel electroplating
(Digital Matrix SA1000)
Abu Sadek

Sputtering
(Intlvach Nanochrome AC/DC)
Ricky Tjeung

Sputtering
(Anatech Hummer BC-20 RF/DC)
Ricky Tjeung

Furnace
(HiTech Furnace)
Ricky Tjeung

Furnace
(SVCS four stack horizontal furnace)
Paul Spizzirri

Plasma enhanced CVD
(Oxford instruments PLASMALAB100)
Dan Smith

Diamond CVD
(Seki Diamond AX6500X and AX6300)
Lachlan Hyde

Polymer Glovebox
(Mbraun MB200)
Lachlan Hyde

Characterisation

Atomic force microscope
(Dimension iCon AFM)
Hemayet Uddin

Bio atomic force microscope
(Nanowizard II Bio AFM)
Hemayet Uddin

FIB-SEM
(FEI Helios Nanolab 600 Dual FIB-SEM)
Fatima Eftekhari

FEG-SEM
(FEI NovaNano SEM 430)
Gediminas Gervinskas

Tabletop SEM
(Hitachi)
Gediminas Gervinskas

Spectroscopic ellipsometer
(J.A. Woollam M-2000DI)
Lachlan Hyde

Laser doppler vibrometer
(Polytec MSA-400 and UHF-120)
Sean Langelier

Profilometer
(Ambios Xp200)
Fatima Eftekhari

Optical profilometer
(Bruker Contour GT-I)
Hemayet Uddin

Light microspectrometer
(Nikon Ti-U)
John Zhu

Zeta sizer
(Malvern Zetasizer Nano ZS)
Hemayet Uddin

UV/VIS spectrophotometer
(Agilent Cary)
Hemayet Uddin

Zeta potential analyser
(Anton Paar SurPASS)
Hemayet Uddin

Laser scanning confocal microscope
(Nikon A1Rsi)
John Zhu

Laser TIRF system
(Nikon TIRF with Ti-U)
John Zhu

Hyperspectral imaging
(Cytoviva)
John Zhu

Scanning ion conductance microscope
(ICnanoS2) 
John Zhu

Microwave probe station
(Signatone WL-1160)  
Abu Sadek

Packaging

Wet dicing saw
(Disco DAD321)
Yang Lim

Scriber / breaker
(Dynatex DTX)
Sean Langelier

Wedge / ball bonders
(Kulicke & Soffa) 
Yang Lim

Etching

Reactive ion etching, general
(Plasmalab100 ICP380) 
Dan Smith

Reactive ion etching, silicon 
(Plasmalab100 ICP380)
Dan Smith

Laboratories

Biochem laboratory
Hemayet Uddin

PC2 laboratory
John Zhu