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Investigation and optimization of reactive ion etching of Si3N4 and polyphthalaldehyde for two-step gray scale fabrication of diffractive optics
Journal of Vacuum Science & Technology B
M. A. Hejazi, W. Tong, A. Stacey, A. Soto-Breceda, M. R. Ibbotson, M. Yunzab, M. I. Maturana, A. Almasi, Y. J. Jung, S. Sun, H. Meffin, J. Fang, M. E.M. Stamp, K. Ganesan, K. Fox, A. Rifai, A. Nadarajah

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