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Ion beam lithography with gold and silicon ions
Applied Physics A
G. Seniutinas , A. Balčytis, Y. Nishijima, A. Nadzeyka, S. Bauerdick and S. Juodkazis
Applied Physics A
G. Seniutinas , A. Balčytis, Y. Nishijima, A. Nadzeyka, S. Bauerdick and S. Juodkazis