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Low Energy Ion Implantation and Annealing of Au/Ni/Ti Contacts to n-SiC
MRS Advances
N. Shrestha, M. Kibel, P. Leech, A. Holland, G. Reeves, M. Ridgway and Phillip Tanner
MRS Advances
N. Shrestha, M. Kibel, P. Leech, A. Holland, G. Reeves, M. Ridgway and Phillip Tanner