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Nanoscale displacement sensing using microfabricated variable inductance planar coils
Applied Physics Letters
M.Coskun, K.Thotahewa, Y.Ying, M.Yuce, A.Neild, T.Alan
Applied Physics Letters
M.Coskun, K.Thotahewa, Y.Ying, M.Yuce, A.Neild, T.Alan