Abstract After a short introduction of the Australian National Fabrication Facility ACT Node and its capabilities, this talk will focus on general aspects of reactive ion etching (RIE) technique will be described such as anisotropy, loading effect, lag effect, RIE chemistries and micro-masking followed by a brief overview of etching dielectrics (SiOx, SiNx) and crystalline Si. The […]

You are invited to the grand opening of the Melbourne Centre for Nanofabrication’s Diamond Deposition Suite. The most advanced of its kind in Australia, the suite provides the unique ability to grow ultra high purity diamond, as well as semi-conducting diamond. Use of thin diamond films is a burgeoning research field, with Australian investigators leading […]